Different types of vacuum pumps have different pressure ranges. Today, vacuum pump manufacturers will introduce you. A vacuum pump is a device or device that uses a mechanical, physical, chemical, or physicochemical method to evacuate a pumped container to obtain a vacuum. In general, a vacuum pump is a device that uses various methods to improve, create, and maintain a vacuum in an enclosed space.
Vacuum pump type Operating pressure range (Pa) Starting pressure (Pa)
Piston vacuum pump 1×105～1.3×102 1×105
Rotary vane vacuum pump 1×105—6.7×10-1 1×105
Water ring vacuum pump 1×105—2.7×103 1×105
Roots vacuum pump 1.3×103—1.3 1.3×103
Turbo Molecular Pump 1.3-1.3×10-5 1.3
Water vapor jet pump 1×105—1.3×10 -1 1×105
Oil diffusion pump 1.3×10-2—1.3×10 -7 1.3×10
Oil vapor jet pump 1.3×10—1.3×10 -2 <1.3×105
Molecular sieve adsorption pump 1×105—1.3×10 -1 1×105
Sputtering ion pump 1.3×10-3—1.3×10 -9 6.7×10-1
Titanium Sublimation Pump 1.3×10-2—1.3×10 -9 1.3×10-2
Zirconium aluminum getter pump 1.3×10—1.3×10 -11 1.3×10
Cryopump 1.3-1.3×10-11 1.3-1.3×10-1
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