Vacuum Pump Common Performance Parameters
Jun 18, 2019| 1. Pumping rate (volume flow rate) (s unit: m3·min-1, m3·s-1, L·s-1)
The ratio of the flow of gas flowing through the test hood to the equilibrium pressure measured at a specified location on the test hood when the pump is fitted with a standard test hood and operated as specified. Referred to as the pumping speed of the pump. That is, the volume of gas that the vacuum pump draws from the pumped container per unit time under a certain pressure and temperature.
2. Ultimate pressure (extreme vacuum) (unit: Pa/MPa/mmHg)
The pump is equipped with a standard test hood and operates under specified conditions to a stable minimum pressure without the introduction of gas. That is, the lowest stable pressure that can be achieved after the inlet end of the vacuum pump is fully pumped.
3. Starting pressure
Pump without damage, starting and pumping pressure
4. Pre-stage pressure
The outlet pressure of the vacuum pump with a discharge pressure lower than one atmospheric pressure.
5. Maximum foreline pressure
Exceeded the pre-stage pressure that can damage the pump.
6. Maximum working pressure
The inlet pressure corresponding to the maximum pumping amount. Under this pressure, the pump can work continuously without deterioration or damage.
7. Pumping capacity (Q unit: Pa·m3·S-1; Pa·L·S-1)
The flow of gas through the inlet of the pump.
8. Compression ratio
The ratio of the outlet pressure of the pump to a given gas to the inlet pressure.