The temperature of the inhaled gas before the first flange of the vacuum pump was 238 °C. The first flange-to-machine rotor spacing does not exceed 400mm, and the gas flow rate is very fast, the time is very short, the process gas should be reduced from 238 ° C to 4.8 ° C, to meet the vacuum pump inlet temperature requirements, the process design is in the pump The inlet flange is added with a 1-inch tube nozzle to inject ethylbenzene for cooling purposes. The amount of ethylbenzene injected is regulated by a control valve on the line. There are two problems in this way: First, the design of the injection point is unreasonable, resulting in a short cooling time, and the suction temperature of the pump is difficult to ensure; second, if the control valve fails, the working temperature of the device will rise completely, and the pump will malfunction.
In addition, before the vacuum pump is destroyed, the rotor and rotor and the rotor and the shell are in contact with each other for a long time. During the period, there are abnormalities in temperature, abnormal sounds, and increased vibration. If the inspectors pay attention, accidents can be avoided.
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